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Home > Dry vacuum equipment > DXJM, DXJH series dry vacuum pump ( Unit ) >DXJM-500A in the production of PV production line

DXJM-500A in the production of PV production line

This case mainly instroduces the contrast experiment of a pv manufacturers in the aspect of tubular PECVD production line imported and domestic pump technique parameters.

 

Vacuum pump model Imported brand vacuum pump DXJM-500A
Name Tubular PECVD
Quartz tube diameter×length φ380mm×2110mm
Thin-film refractive index Standard values:2.0-2.2 continuously adjustable
2 2
Film thickness Standard values: 80nm±4% continuously adjustable
81 nm 81 nm
Number of installed piece 216 216
Wafer size 156mm×156mm 156mm×156mm
Working vacuity 2×10-1 Pa 2×10-1 Pa
Pump-down time 3 min 3.2 min

DXM-500A could be compatible with some imported brands vacuum pump in the interface of air inlet, air-vent, water, nitrogen, and power, etc.
And currently has been used in batches in many domestic photovoltaic companies.
In the photovoltaic industry production lines, some series dry pump can replace the other imported brand products with the same pumping speed.

 

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Home > Dry vacuum equipment > DXJM, DXJH series dry vacuum pump ( Unit ) >DXJM-500A in the production of PV production line