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Oil free bilateral vortex dry pump

Oil free bilateral vortex dry pump

Main application

◎ Thin film preparation equipment, big science engineering and chemical analysis;
◎ Semiconductor packaging equipment pump with oil free pumping system;
◎ Molecular pump backing pump;
◎ Medical devices, biological products and drug preparation;
◎ Food, pharmaceutical and other packaging equipment;
◎ Gas recovery, liquid crystal (LC) filling.

Technical index

◎ No oil in the pump, available to obtain clean vacuum environment, low noise
◎ Need water-cooling required, corrosion resistance, easy operation, low maintenance cost

Item Technical index
Model DXG-2A DXG-4B DXG-8B DXG-16A
Nominal pumping speed 2L/S 4L/S 8 L/S 16 L/S
Ultimate pressure ≤5Pa 1Pa ≤1Pa ≤1Pa
Vortex pump leakage rate 1×10-6 pa.m3/S, special gas can achieve 1×10-8Pa.m3/S
Water vapor processing capacity
(Gas ballast on )
5g/day 25g/day 25g/day 25g/day
Motor parameters Three phase 380V/single phase 220V 50Hz 0.18KW Three phase 380V/single phase 220V 50Hz 0.55KW Three phase 380V/single phase 220V 50Hz 0.75KW Three phase 380V/single phase 220V 50Hz 1.5KW
RPM 1450rpm(50Hz) 1450rpm(50Hz) 1450rpm(50Hz) 1450rpm(50Hz)
Environment temperature 5~40℃ 5~40℃ 5~40℃ 5~40℃
Noise 〈60dB 〈65dB 〈65dB 〈68dB
Noise (Gas ballast) 〈65dB 〈68dB 〈70dB 〈74dB
Air inlet flange connection KF25 KF25 KF40 KF40
Air-vent flange connection KF16 KF25 KF25 KF40
Overall size (L×W×H) 320×230×230(mm) 475×265×350(mm) 490×330×360(mm) 560×392×395(mm)
Weight 16Kg 30Kg 39Kg 60Kg

Oil free bilateral vortex dry pump

Oil free bilateral vortex dry pump

 

 

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