 |
Products: |  |
Home >
Dry vacuum equipment >
Oil free bilateral vortex dry pump
Oil free bilateral vortex dry pump
Main application
◎ Thin film preparation equipment, big science engineering and chemical analysis;
◎ Semiconductor packaging equipment pump with oil free pumping system;
◎ Molecular pump backing pump;
◎ Medical devices, biological products and drug preparation;
◎ Food, pharmaceutical and other packaging equipment;
◎ Gas recovery, liquid crystal (LC) filling.
Technical index
◎ No oil in the pump, available to obtain clean vacuum environment, low noise
◎ Need water-cooling required, corrosion resistance, easy operation, low maintenance cost
| Item | Technical index | |||
| Model | DXG-2A | DXG-4B | DXG-8B | DXG-16A |
| Nominal pumping speed | 2L/S | 4L/S | 8 L/S | 16 L/S |
| Ultimate pressure | ≤5Pa | 1Pa | ≤1Pa | ≤1Pa |
| Vortex pump leakage rate | 1×10-6 pa.m3/S, special gas can achieve 1×10-8Pa.m3/S | |||
| Water vapor processing capacity (Gas ballast on ) |
5g/day | 25g/day | 25g/day | 25g/day |
| Motor parameters | Three phase 380V/single phase 220V 50Hz 0.18KW | Three phase 380V/single phase 220V 50Hz 0.55KW | Three phase 380V/single phase 220V 50Hz 0.75KW | Three phase 380V/single phase 220V 50Hz 1.5KW |
| RPM | 1450rpm(50Hz) | 1450rpm(50Hz) | 1450rpm(50Hz) | 1450rpm(50Hz) |
| Environment temperature | 5～40℃ | 5～40℃ | 5～40℃ | 5～40℃ |
| Noise | 〈60dB | 〈65dB | 〈65dB | 〈68dB |
| Noise (Gas ballast) | 〈65dB | 〈68dB | 〈70dB | 〈74dB |
| Air inlet flange connection | KF25 | KF25 | KF40 | KF40 |
| Air-vent flange connection | KF16 | KF25 | KF25 | KF40 |
| Overall size (L×W×H) | 320×230×230(mm) | 475×265×350(mm) | 490×330×360(mm) | 560×392×395(mm) |
| Weight | 16Kg | 30Kg | 39Kg | 60Kg |
Home >
Dry vacuum equipment >
Oil free bilateral vortex dry pump
DXT-450 Magnetron Sputtering System
