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DXF-600 Hard Carbon Film Preparation Equipment

Application

Vertical type high vacuum coating equipment with one chamber could apply for developing single film-DLC and other films. DLC has the advantages of high transmittance of infrared spectroscopy, high hardness, small friction coefficient, good chemical stability and so on. It could be antireflection film and protect film of many optical materials and has functions of resistance to wear, resistant to corrosion, deliquescence proof and oxidation resistance. It is suitable for war industry and optical glass manufactures, who batch produce infrared lenses.

Composition

The equipment mainly consists of coating chamber, target electrode, electromagnetic coil, control power supply, pump exhausting system, vacuum measurement system, electronic control system, gas circuit system, water circuit system and so on.

 

DXF-600 Hard Carbon Film Preparation Equipment   DXF-600 Hard Carbon Film Preparation Equipment

DXF-600 Hard Carbon Film Preparation Equipment

Technical Index

Model DXF-600
Sputtering Vacuum Chamber Upright cylindrical, Ø600*400mm
Sputtering Chamber Ultimate Vacuum ≤5*10-4Pa (after bake and degassing)
Configuration of Vacuum System Molecular pump, mechanical pump, slide valve
Time of Recovery Vacuum Reach 3*10-3Pa in 40 mins ( expose in air for short time and inflate dry chlorine and then begin air exhaust)
Structure of Target Electrode and Upper Counter Electrode Install a target electrode in the chassis of coating chamber and place a sample on it. The size of sample: Ø215mm. Install a set upper counter electrode on the cover. The distance between target electrode and upper counter electrode could be continuously adjusted to become capacity plate antenna
Electronic Control System radio-frequency power supply, excitation source, control power supply and so on
Air Circuit System Adopt three channel MFC quality flow measuring controller to  intake air
Floor Space Mainframe 1200*1150mm2
Electric Control Cabinet 700*700mm2(2 sets)

 

 

 

 

 

 

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