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DXD-500 Electronic Beam Evaporation Coating System

Application

It is apply for the preparation of electroconductive film, semiconductor film, ferroelectric film, optical thin film and so on. It can be widely applied It is widely used in scientific research and small batch preparation of universities and research institutions.

Composition

The system mainly consists of evaporation vacuum chamber, E shape electronic gun, heating evaporation electrode, substrate heat revolution plate, working gas circuit, pumping system, vacuum measurement and electronic control system, installation machine and so on.

 

DXD-500 Electronic Beam Evaporation Coating System

DXD-500 Electronic Beam Evaporation Coating System

Technical Index

Model DXD-500
Structure Vacuum chamber adopts U shape crate with door front and has pump system behind.
Vacuum Chamber 500*500*600mm3
Configuration of Vacuum System Compound molecular pump, mechanical pump, slide valve
Ultimate Pressure ≤6.67*10-5Pa (after bake and degassing)
Time of Recovery Vacuum Reach 6.67*10-4Pa in 45 mins ( expose in air for short time and inflate dry chlorine and then begin air exhaust)
Electronic Beam Evaporation Source E Shape Electronic Gun Positive pole voltage: 6kv, 8kv
Quantity ( set) 2
Crucible Water cooling crucible, four holes design, and capacity of each: 11ml
Power 0-6KW adjustable
Resistance Evaporation Source (Optional) Voltage 5, 10V
Power  Current: 300A, Max. output power: 3Kw
Quantity  1 set, could be changed
Water Cooling Electrode  3 pieces, could be made into 2 evaporation boats
Type and Size of Work Rest Size of substrate: could place 4 inches substrate
MAX. heat temperature of substrate 800℃±1℃
Substrate could continuously rotate. revolving speed: 5-60rpm
The distance between substrate and evaporation source is 300-350mm, which is adjustable.
Components of manual control sample baffle 1 set
Air Circuit System Quality flow controller 1 channel
Quartz Crystal Film Thickness Controller Monitor thickness of film display range: 0-99μ9999Å
Floor Space Mainframe 900*800mm2
Electric Control Cabinet 800*800mm2(2 sets)

 

 

 

 

 

 

 

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