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DXJ-1000 Square Four Chambers Magnetron Sputtering System
DXJ-1000 Square Four Chambers Magnetron Sputtering System
Application
It is apply for sediment of metal film (Al, Ag, Ni, Cu, Ti, Pd, and so on) on the surface of crystalline silicon, could achieve reactive sputtering and complete coating technology of magnetron sputtering on the condition of high vacuum and low vacuum. It has the ability to continuously prepare crystalline silicon photovoltaic cell film in large size and many different specifications.
Composition
The system mainly consists of sample injection chamber, sputtering chamber, sample making chamber, substrate delivery institution, pumping and vacuum measurement system, gas circuit system, electronic control system and so on.
DXJ-1000 Square Four Chambers Magnetron Sputtering System
Technical Index
| Model | DXJ-1000 | |
| Main Sputtering Vacuum Chamber | Square sputtering vacuum chamber, size: 1000*700*350mm | |
| Sample Injection Chamber, | Square sputtering vacuum chamber, size: 700*700*350mm | |
| Configuration of Vacuum System | Mechanical pump, molecular pump, slide valve | |
| Ultimate Pressure | Main Sputtering Chamber | ≤8*10-5Pa (after bake and degassing) |
| Sample Injection Chamber |
≤6.6*10-4Pa (after bake and degassing) | |
| Time of Recovery Vacuum | Main Sputtering Chamber | Reach 6.6*10-4Pa in 40 mins ( expose in air for short time and inflate dry chlorine and then begin air exhaust) |
| Sample Injection Chamber |
Reach 5*10-3Pa in 20 mins ( expose in air for short time and inflate dry chlorine and then begin air exhaust) | |
| Component of Permanent Magnetron Sputtering Targets | Two magnetron targets, square target about size: 450*75mm. The distance between target and sample is about 80mm. | |
| Substrate Heat Plate | Substrate Structure | Size:125*125mm or 156*156mm It could be placed 4 pieces for one time. |
| Heat Temperature | Room temperature about 400℃±2℃, could be controlled and adjustable | |
| Other Configuration | Equipped with ion gun washing and automatic control | |
| Air Circuit System | Quality flow controller 3 channel | |
| Floor Space | Mainframe | 2655*930mm2 |
| Electric Control Cabinet | 700*700mm2(2 sets) | |
Home >
vacuum applied systems >
DXJ-1000 Square Four Chambers Magnetron Sputtering System
DXT-450 Magnetron Sputtering System
