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DXSIP-200 sputtering ion pump

 

DXSIP-200 sputtering ion pump

DXSIP-200 sputtering ion pump

1. Technical indicator

Item Unit Parameters
Pumping rate L/S nitrogen         230(at 1×10-6 pa)
         135(at 1×10-7Pa)
  argon          65(at 1×10-7Pa)
Ultimate pressure    pa          ≤7.0×10-10 (ambient temperature≤25℃
Start pressure    Pa                    ≤2×10-2
Baking temperature    ℃                 ≤300(with magnet)
termination flange                        CF150
Anode voltage    kV                     ≤+7(dc)
Overall dimension    mm             442(L)×210(w)×460(H)
Weight    Kg                      66

 

2.Installation diagram

 

DXSIP-200 sputtering ion pump

 

3. Pumping speed curve

pumping speed curve(N2)

extraction curve(Ar)
sputtering vacuum ion pump sputtering vacuum ion pump

 

The corresponding relationship curve between the pressure and Ion flow curve

sputtering vacuum ion pump

 

 

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