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Power
Power
The power dimension
Ion pump power
- Touch screen Settings: equipped with large size touch screen, operation more convenient.
- Remote control mode: Equipped with the remote control mode and have I/O, MODBUS models.
- Display function: Display resolution reach the degree of the 10nA, can show the voltage, Current, vacuum and other indicators.
- predictability programming setting: pre- operating procedures, the menu read ion pump parameters, Apply to the whole series of ion pump.
- Baking control mode: Baking temperature 100-300s℃can adjusted continuously.
The secondary sputtering ion pump power technical indicators | ||
Item | Unit | parameter |
Input voltage | V | AC220V 10%,50Hz |
Output voltage | DC+3Kv,+5kV,+7kV 10% | |
Maximum output power | W | 200 |
Short circuit protection current | 150mA(at3000V) | |
Minimum detectable ion flow | nA | 10 |
Range of the ion flow display | 100mA-100nA | |
Measuring rangof Vacuum degree | Pa | Nearly 1 10-2-8 10-9 |
Voltage display resolution | V | 10 |
Current display resolution | nA | 100 |
Control interface | 1/O,RS-232/RS-485(modbus) | |
Overall dimensions | mm | 241(W)×133(H)×413(D) |
Display | 4.3’’ color touchscreen | |
Weight | Kg | 11.5 |
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