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Home > Dry vacuum equipment > DXJM, DXJH series dry vacuum pump ( Unit )

DXJM, DXJH series dry vacuum pump ( Unit )

 

Multi-stage Roots pump   Claw type Roots composite structure
DXJM, DXJH series dry vacuum pump ( Unit ) DXJM, DXJH series dry vacuum pump ( Unit )

 

Application fields

Typical application
process		 Cleaner process Moderate corrosion
process		 Strong corrosion
process
Pump type Loadlock Transfer Metrology Lithography PVD process PVD pre-Clean RTA Strip/Ashing Oxide Etch Silicon Etch Metal Etch Implant Source HDP-CVD RTP SACVD MOCVD PECVD LPCVD ALD
DXM-100A ● ● ● ● ● ● ● ● ● ● ● ●              
DXM-120A ● ● ● ● ● ● ● ● ● ● ● ●              
DXJM-500A ● ● ● ● ● ● ● ● ● ● ● ●              
DXJM-1000A ● ● ● ● ● ● ● ● ● ● ● ●              
DXH-600A ○ ○ ○ ○ ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●
DXJH-500A ○ ○ ○ ○ ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●
DXJH-1000A ○ ○ ○ ○ ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●
DXJH-1000B ○ ○ ○ ○ ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●
DXJH-1800A ○ ○ ○ ○ ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●
DXJH-4200A ○ ○ ○ ○ ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●
DXJH-5000A ○ ○ ○ ○ ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●

○: Available  ●: Recommended use

Key application:

Integrated circuit、solar battery、LED field、available to loading cavity 、transmission cavity etc. cleaner process, and also available to PVD、etching、multiple CVD etc. moderate corrosion process or strong corrosion process.


Other application:

Vacuum melting (temper and anneal、steel degasification, surface treatment molten, refining, casting and welding, etc.
Vacuum coating system ( glass coating、precision optics, etc)
Vacuum packaging、food、chemical industry、medicine、 motor manufacturing industries distill、evaporation、drying, etc.

 

Model DXM-100A DXJM-500A/
DXJH-500A		 DXM-120A DXJM-1000A DXJH-1000A DXJH-1000B/
DXH-1800A		 DXH-600A DXJH-4200A DXJH-5000A
Pumping speed 100m3/h 480m3/h 100m3/h 800m3/h 750m3/h 1000/1400m3/h 620m3/h 3600m3/h 4700 m3/h
Utimate pressure
(Only the nitrogen purge of the shaft sealing system)		 10Pa 2×10-1Pa 5Pa 2×10-1Pa 2×10-1Pa 2×10-1Pa ≤10Pa ≤5×10-1Pa ≤5×10-1Pa
Power Three-phase380
/208 50Hz		 Three -phase380
/208 50Hz		 Three-phase380
/208 50Hz		 Three -phase380
/208 50Hz		 Three -phase380
/208 50Hz		 Three -phase380
/208 50Hz		 Three -phase380
/208 50Hz		 Three -phase380
/208 50Hz		 Three -phase380
/208 50Hz
Motor rated power 1.5KW 3KW 1.9KW 3.8KW 5.1KW 5.8KW 22KW 33KW 18.5KW
Rotate speed 2865rpm 2865rpm 4600-5730rpm 4600-5730rpm 3420rpm 3420rpm 2865rpm 2865rpm 5730rpm
Environment temperature 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃ 5~40℃
Nitrogen flow 0~60 slm 0~60 slm/
0-120 slm		 0~14 slm 0~14 slm 10~120 slm 10~120 slm 0~150 slm 0~150 slm 10~120 slm
Cooling Water Flow) >1L/min >1L/min >1L/min >2L/min >4L/min >4L/min >4L/min >8.5L/min >10L/min
Maximum noise <70dB <70dB <68dB <68dB <70dB <70dB <80dB <80dB <75dB
Air inlet flange connection KF50 ISO100 KF50 ISO100 ISO100 ISO100/
ISO160		 ISO100 ISO250 ISO250
Vent connection flange KF40 KF40 KF25 KF25 KF40 KF40 ISO63 ISO63 KF40
Overall dimensions 830*390*530
(mm)		 1030*405*910
(mm)		 676*295*410 (mm) 676*295*410 (mm) 845*445*874 (mm) 1079*485*894
(mm)		 1985*1107*1299 (mm) 1985*1107*1810 (mm) 1185*540*965 (mm)
Weight 255Kg 380Kg 120Kg 230Kg 450Kg 510Kg 950Kg 1700Kg 890Kg

 

DXJM, DXJH series dry vacuum pump ( Unit )

 

DXJM, DXJH series dry vacuum pump ( Unit )

 

DXJM, DXJH series dry vacuum pump ( Unit )

 

DXJM, DXJH series dry vacuum pump ( Unit )

 

DXJM, DXJH series dry vacuum pump ( Unit )

 

DXJM, DXJH series dry vacuum pump ( Unit )

 

JGH-1000B in the application of semiconductor devices

DXJM-500A in the production of PV production line

Optimize product performance, provide customized solutions

 

 

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