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Ultra-high vacuum flashboard valve series

Main appliance

Widely used in various ultra high vacuum system and IC equipment vacuum system air partition or connect, can replace similar imported products

Structure characteristic

Ultra high vacuum, super clean, long service life; Valve body vacuum brazing, vacuum side no gas entrapment, stamping valve plate; sulfide aprons, unique sealing structure.

 

 

Ultra-high vacuum flashboard valve series

Ultra-high vacuum flashboard valve series

Structure characteristic

Stainless steel valve body, compact structure, uniform stress, good sealing, easy tear open outfit;
Clean air and noncorrosive gas medium, the valve can be installed in any direction
The pneumatic flashboard valve equipped with dedicated magnetic switch and can achieve valve switch status signal output.

Valve series DXQ-J series ultra-high vacuum pneumatic flashboard valve DC-J series ultra-high vacuum manually flashboard valve DXQ-B series ultra-high vacuum pneumatic flashboard valve DC-B series ultra-high vacuum manually flashboard valve
Item Performance index Performance index Performance index Performance index
Leak rate Valve body ＜5×10-11Pa·m3/S ＜5×10-11Pa·m3/S ＜5×10-11Pa·m3/S ＜5×10-11Pa·m3/S
Valve plate ＜5×10-11Pa·m3/S ＜5×10-11Pa·m3/S ＜5×10-11Pa·m3/S ＜5×10-11Pa·m3/S
Working pressure range 1×10-8Pa～1.2×105Pa 1×10-8Pa～1.2×105Pa 1×10-8Pa～1.2×105Pa 1×10-8Pa～1.2×105Pa
Max. pressure of any direction valve 1.2×105Pa 1.2×105Pa 1.2×105Pa 1.2×105Pa
The max. differential pressure when on ＜3000Pa ＜3000Pa ＜3000Pa ＜3000Pa
Maintenance before running for the first time(vacuum test) 30000times 30000times 30000times 30000times
Pneumatic pressure range 0.4Mpa～0.6MaPa ---- 0.4Mpa～0.6MPa ----
Drying temperature On ＜200℃ ＜200℃ ≤150℃ ＜150℃
Off ＜150℃ ＜150℃ ≤120℃ ＜120℃
Connection flange DXQ-100-J CF100 DC-100-J CF100 DXQ-100-B CF100/φ100 DC-100-B CF100
DXQ-150-J CF150 DC-150-J CF150 DXQ-150-B CF150/φ150 DC-150-B CF150
DXQ-200-J CF200 DC-200-J CF200 DXQ-200-B CF200/φ200 DC-200-B CF200
Weight DXQ-100-J 12.0kg DC-100-J 11.6kg DXQ-100-B 13Kg DC-100-B 12.8kg
DXQ-150-J 18.5KG DC-150-J 17.5kg DXQ-150-B 18kg DC-150-B 16.5kg
DXQ-200-J 32.5KG DC-200-J 31.5kg DXQ-200-B 38kg DC-200-B 36.0kg

 

Outline and installation size

Model DN A B C D E F G H I J K Q L N-φP
DXQ-100-J 100 70 152 130.3 66.5 72 248.2 477.7 140.1 9 160 75 82 59.5 16-M8
DXQ-150-J 150 70 202 181.1 68.5 97 338.5 608 190.5 25 220 75 92 59.5 20-M8
DXQ-200-J 200 82.5 253 231.8 84 124 436.5 784 238.5 38.5 252 94 106 69 24-M8
DXC-100-J 100 70 152 130.3 66.5 72 248.2 477.7 140.1 9 160 75 32   16-M8
DXC-150-J 150 70 202 181.1 68.5 97 338.5 608 190.5 25 220 75 32   20-M8
DXC-200-J 200 82.5 253 231.8 84 124 436.5 784 238.5 38.5 252 94 55   24-M8
DXQ-100-B 100 57 152 130.3 67 73 246 478 142 19 162 75 92   16-M8
DXQ-150-B 150 59 202 181.1 75 100 324 583.5 196 30 240 75 92   20-M8
DXQ-200-B 200 82 253 231.8 80 127 435 778.5 254 55 290 94 106   24-M8
DXC-100B 100 57 152 130.3 67 73 246 504 142 19 162   102   16-M8
DXC-150B 150 59 202 181.1 75 100 324 610 196 30 240   102   20-M8
DXC-200B 200 82 253 231.8 80 127 435 813 254 55 290   102   24-M8

 

 

 

 

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