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DXSM Thin Film Solar Cell Continuous Preparation Equipment
1. DXSM-P Copper Indium Gallium Selenium Solar Cell Continuous preparations equipment
Application
It is applied for developing and small preparing of copper, indium, gallium, selenium, solar cell.
Composition
The system mainly consists of copper, indium, gallium, selenium evaporation deposition chamber, molybdenum sputtering chamber, copper, indium, gallium, sputtering chamber, sample injection chamber, solemnization chamber, ZnO sputtering chamber, laser photoetching chamber, electrochemistry fabrication processing buffer chamber, sample injection chamber, sample delivery chamber, beam source furnace, magnetic control target, sample magnetic delivery institutions, sample bank device, sample heating institution, sample cart, pump system, vacuum measurement system, gas circuit system, electric control system and so on.
DXSM-P Copper Indium Gallium Selenium Solar Cell Continuous preparations equipment
Technical Index
- Ultimate pressure of Deposition chamber: 6.6*10-8Pa,
- Ultimate pressure of sputtering chamber: 6.6*10-5Pa,
- Sample injection chamber adopts manually open and close and could be placed 6 pieces samples,
- Sample is glass, size: 100*100*3mm. Sputtering chamber could be placed one piece sample.
- Sample could be heated and could manually delivery sample to each related stations in vacuum state.
2. DXSM-C CdTe Solar Cell solar cell coating equipment
Application
It is applied for producing thin film solar cell.
Composition
The system mainly consists of sample injection chamber, coating chamber, sampling chamber, sample delivery institutions, sample bank, high pressure plasma bomb device, radio frequency power supply, baking lighting system, pump exhausting system, vacuum measurement system, gas circuit system, electric control system, coating system by microprocessor controland so on.
DXSM-C CdTe Solar Cell solar cell coating equipment
Technical Index
- Ultimate pressure of sputtering chamber: better than 6.6*10-4Pa after baking 6 hours and continuously exhausting
- Ultimate pressure of sample injection and sampling chamber: 3*10-2Pa,
- Vacuum chamber: rectangle liner configuration stainless steel structure
- Sample is glass, size: 100*100*3mm. Sputtering chamber could be placed one piece sample.
- Cell size: 300*400mm. There is sample bank in sample injection chamber, and could be placed 6 pieces solar panels substrate.
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