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DXSIP-100 sputtering ion pump
DXSIP-100 sputtering ion pump
1. Technical indicator
Item | Unit | Parameters | |
Pumping rate | L/S | nitrogen | 110(at 1×10-6pa) |
80(at 1×10-7Pa) | |||
argon | 50(at1×10-7Pa) | ||
Ultimate pressure | pa | ≤1.0×10-9 (ambient temperature≤25℃ | |
Start pressure | Pa | ≤2×10-2 | |
Baking temperature | ℃ | ≤300(with magnet) | |
termination flange | CF100 | ||
Anode voltage | kV | ≤+7(dc) | |
Overall dimension | mm | 290(L)×1589(w)×310(H) | |
Weight | Kg | 38 |
2.Installation diagram
3. Pumping speed curve
pumping speed curve(N2) | extraction curve(Ar) |
The corresponding relationship curve between the pressure and Ion flow curve
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