We specialized in the production and sale of DXSIP-100 sputtering ion pump, sputtering ion pump, can be customized according to various DXSIP-100 sputtering ion pump, sputtering ion pump, if you need to know more DXSIP-100 sputtering ion pump, sputtering ion pump relations information, please contact us.
Products:
Home > Sputtering ion pump > DXSIP-100 sputtering ion pump

DXSIP-100 sputtering ion pump

 

DXSIP-100 sputtering ion pump

DXSIP-100 sputtering ion pump

1. Technical indicator

Item Unit Parameters
Pumping rate L/S nitrogen 110(at 1×10-6pa)
80(at 1×10-7Pa)
argon 50(at1×10-7Pa)
Ultimate pressure pa ≤1.0×10-9 (ambient temperature≤25℃
Start pressure Pa ≤2×10-2
Baking temperature ≤300(with magnet)
termination flange   CF100
Anode voltage kV ≤+7(dc)
Overall dimension mm 290(L)×1589(w)×310(H)
Weight Kg 38

 

2.Installation diagram

 

DXSIP-100 sputtering ion pump

 

3. Pumping speed curve

pumping speed curve(N2)

extraction curve(Ar)

sputtering vacuum ion pump sputtering vacuum ion pump

 

The corresponding relationship curve between the pressure and Ion flow curve

sputtering vacuum ion pump

 

 

 

Home > Sputtering ion pump > DXSIP-100 sputtering ion pump