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DXSIP-100 sputtering ion pump
DXSIP-100 sputtering ion pump
1. Technical indicator
| Item | Unit | Parameters | |
| Pumping rate | L/S | nitrogen | 110(at 1×10-6pa) |
| 80(at 1×10-7Pa) | |||
| argon | 50(at1×10-7Pa) | ||
| Ultimate pressure | pa | ≤1.0×10-9 (ambient temperature≤25℃ | |
| Start pressure | Pa | ≤2×10-2 | |
| Baking temperature | ℃ | ≤300(with magnet) | |
| termination flange | CF100 | ||
| Anode voltage | kV | ≤+7(dc) | |
| Overall dimension | mm | 290(L)×1589(w)×310(H) | |
| Weight | Kg | 38 | |
2.Installation diagram
3. Pumping speed curve
| pumping speed curve(N2) | extraction curve(Ar) |
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The corresponding relationship curve between the pressure and Ion flow curve

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DXSIP-100 sputtering ion pump




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