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DXT-450 Magnetron Sputtering System
DXT-450 Magnetron Sputtering System
Application
It is apply for the preparation of a new type thin-film material, including nanoscale monolayer and multilayer multifunctional film, hard film, metal film, semiconductor film, dielectric film and so on. It can be widely applied for the thin-film material scientific research and small batch preparation of universities and research institutions.
Composition
The system mainly consists of sputtering vacuum chamber, permanent magnetron sputtering target (three targets), monocrepid heater, DC power supply, radio-frequency power supply, working gas circuit, pumping system, vacuum measurement, electronic control system and installation cabinet.
DXT-450 Magnetron Sputtering System
Technical Index
| Model | DXT-450 | |
| Sputtering Vacuum Chamber | Cylindrical front opening door structure, size: Ø450*400mm | |
| Configuration of Vacuum System | Compound molecular pump, mechanical pump, pneumatic slide valve, imported SMC cylinder throttle | |
| Ultimate Pressure | ≤6.6*10-6Pa (after bake and degassing) | |
| Time of Recovery Vacuum | 25 mins could achieve 6.6*10-4Pa ( expose in air and inflate dry chlorine and then begin air exhaust | |
| Component of Permanent Magnetron Sputtering Targets | Three permanent targets, target size: Ø60mm (One among them could sputter magnetic material.) Radio sputtering of each target and direct current sputtering are compatible. Intarget water cooling, Three targets could deflect to above sample center together. The distance between target and sample is 90-130mm, which is adjustable. Each target equipped with imported SMC rotating Pneumatic baffle. | |
| Monocrepid Heater | Sample Size | Ø4 inches |
| Mode of Motion | Substrate could continuously rotate, revolving speed: 0-30 rpm | |
| Heat | Heat imported heater strip, MAX. heat temperature 600℃±1℃ | |
| Baffle Form | Imported SMC corner cylinder control Quality flow controller 2 channel |
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| Air Circuit System | ||
| Computer Control System | Adopt PLC+ Industrial Personal Computer+ touch screen automatic control mode | |
| *Accessories for Choice | Film thickness gauge, pump, cooling water cycle machine | |
| Floor Space | Mainframe:1m*1.8m, electric control cabinet:0.9m*0.6m | |
Home >
vacuum applied systems >
DXT-450 Magnetron Sputtering System
DXT-450 Magnetron Sputtering System
